@misc{indiciae700ec2f6e4d2, title = {Lithium source for focused ion beam implantation and analysis}, author = {Titze, Michael and Perry, Daniel L. and Auden, Elizabeth A. and Pacheco, Jose L. and Abraham, John S. and Bielejec, Edward S.}, year = {2021}, doi = {10.1116/6.0000645}, url = {https://www.osti.gov/biblio/1828030}, note = {Source identifier: 1828030} }