@misc{indiciae5557316d03e1,
  title = {B- and Al- Doped Delta Layers in Si Using Halogen-Based Precursors.},
  author = {Baek, S. and Farzani, A. and Radue, M. S. and Campbell, Quinn and Dwyer, K. J. and Baczewski, Andrew David and Mo, Y. and Misra, Shashank and Butera, R. E.},
  year = {2020},
  doi = {10.2172/1831356},
  url = {https://www.osti.gov/biblio/1831356},
  note = {Source identifier: 1831356}
}