@misc{indiciaed6c8c57a083f, title = {Shielded and Low-Damping SPM Probes for Quantitative Electrical and Electrochemical Characterization (Phase IIA)}, author = {Ziegler, Dominik}, year = {2021}, doi = {10.2172/1832332}, url = {https://www.osti.gov/biblio/1832332}, note = {Source identifier: 1832332} }