TY  - RPRT
TI  - Developing Multi-line FLEET using Periodic Mask Design.
AU  - Marshall, Garrett Joseph
AU  - Zhang, Yibin
AU  - Beresh, Steven J.
AU  - Richardson, Daniel R.
AU  - Casper, Katya Marie
PY  - 2020
UR  - https://www.osti.gov/biblio/1833779
ID  - 1833779
ER  -