@misc{indiciae3786c7def5f0,
  title = {Focused Ion Beam Failure Analysis and Circuit Edit Applications.},
  author = {Shul, Randy John. and Rye, Michael J. and Shaar, Subhei Iyad and Zortman, William A.},
  year = {2020},
  doi = {10.2172/1834988},
  url = {https://www.osti.gov/biblio/1834988},
  note = {Source identifier: 1834988}
}