TY  - RPRT
TI  - Focused Ion Beam Failure Analysis and Circuit Edit Applications.
AU  - Shul, Randy John.
AU  - Rye, Michael J.
AU  - Shaar, Subhei Iyad
AU  - Zortman, William A.
PY  - 2020
DO  - 10.2172/1834988
UR  - https://www.osti.gov/biblio/1834988
ID  - 1834988
ER  -