@misc{indiciaec0964c2ef52e,
  title = {Optical lithography},
  author = {Naulleau, P},
  year = {2019},
  doi = {10.1016/b978-0-12-803581-8.10433-3},
  url = {https://www.osti.gov/biblio/1835561},
  note = {Source identifier: 1835561}
}