@misc{indiciae63bb6b565ea0,
  title = {Intelligent Agents for the Optimization of Atomic Layer Deposition},
  author = {Paulson, Noah H. and Yanguas-Gil, Angel and Abuomar, Osama Y. and Elam, Jeffrey W.},
  year = {2021},
  doi = {10.1021/acsami.1c00649},
  url = {https://www.osti.gov/biblio/1839075},
  note = {Source identifier: 1839075}
}