TY  - RPRT
TI  - Method for fabricating superconducting devices using a focused ion beam
AU  - Cybart, Shane A.
AU  - Cho, Ethan Y.
AU  - Dynes, Robert C.
AU  - Wong, Travis J.
PY  - 2021
UR  - https://www.osti.gov/biblio/1840263
ID  - 1840263
ER  -