@misc{indiciae368049543cb7,
  title = {Isotropic etchback method of linewidth tailoring multilayer dielectric diffraction gratings for improvement of laser damage resistance and diffraction efficiency},
  author = {Britten, Jerald A. and Larson, Cindy C. and Nguyen, Hoang K.},
  year = {2021},
  url = {https://www.osti.gov/biblio/1840316},
  note = {Source identifier: 1840316}
}