TY  - RPRT
TI  - Isotropic etchback method of linewidth tailoring multilayer dielectric diffraction gratings for improvement of laser damage resistance and diffraction efficiency
AU  - Britten, Jerald A.
AU  - Larson, Cindy C.
AU  - Nguyen, Hoang K.
PY  - 2021
UR  - https://www.osti.gov/biblio/1840316
ID  - 1840316
ER  -