@misc{indiciae11c1bac5fb6a,
  title = {Atomic layer deposition of fluoride thin films},
  author = {Elam, Jeffrey W. and Mane, Anil U. and Gebhard, Sr., Michael John},
  year = {2021},
  url = {https://www.osti.gov/biblio/1840416},
  note = {Source identifier: 1840416}
}