@misc{indiciaee68e4c412ebd,
  title = {Atomically precise digital e-beam lithography},
  author = {Randall, John N. and Owen, James H.G. and Fuchs, Ehud and Saini, Rahul and Santini, Robin and Moheimani, S. O.R.},
  year = {2020},
  doi = {10.1117/12.2552083},
  url = {https://www.osti.gov/biblio/1842453},
  note = {Source identifier: 1842453}
}