TY - RPRT TI - Diffuse X-ray scattering from polished silicon: application of the distorted wave Born approximation AU - Macrander, Albert AU - Assoufid, Lahsen AU - Narayanan, Suresh AU - Khachatryan, Ruben PY - 2022 DO - 10.1107/s1600577522000534 UR - https://www.osti.gov/biblio/1844019 ID - 1844019 ER -