TY  - RPRT
TI  - Megahertz Bandwidth Bulk Micromachined Optomechanical Accelerometer With Fiber Optical Interconnects.
AU  - Dominguez, Daniel
AU  - Hackett, Lisa Anne Plucinski
AU  - Miller, Michael Ross
AU  - Restrepo, Jennifer
AU  - Casper, Katya Marie
AU  - Eichenfield, Matt
PY  - 2021
DO  - 10.2172/1847605
UR  - https://www.osti.gov/biblio/1847605
ID  - 1847605
ER  -