@misc{indiciae416f82060f9a,
  title = {Megahertz Bandwidth Bulk Micromachined Optomechanical Accelerometer.},
  author = {Dominguez, Daniel and Hackett, Lisa Anne Plucinski and Miller, Michael Ross and Restrepo, Jennifer and Casper, Katya Marie and Eichenfield, Matt},
  year = {2021},
  doi = {10.2172/1847615},
  url = {https://www.osti.gov/biblio/1847615},
  note = {Source identifier: 1847615}
}