@misc{indiciaeb6da0847acdb,
  title = {A MEMS Nanopositioner With Integrated Tip for Scanning Tunneling Microscopy},
  author = {Alipour, Afshin and Coskun, M. Bulut and Moheimani, S. O. Reza},
  year = {2021},
  doi = {10.1109/jmems.2021.3052180},
  url = {https://www.osti.gov/biblio/1848734},
  note = {Source identifier: 1848734}
}