TY  - RPRT
TI  - A MEMS Nanopositioner With Integrated Tip for Scanning Tunneling Microscopy
AU  - Alipour, Afshin
AU  - Coskun, M. Bulut
AU  - Moheimani, S. O. Reza
PY  - 2021
DO  - 10.1109/jmems.2021.3052180
UR  - https://www.osti.gov/biblio/1848734
ID  - 1848734
ER  -