@misc{indiciae92288cced8aa,
  title = {Increased selectivity in area-selective ALD by combining nucleation enhancement and SAM-based inhibition},
  author = {de Paula, Camila and Bobb-Semple, Dara and Bent, Stacey F.},
  year = {2021},
  doi = {10.1557/s43578-020-00013-4},
  url = {https://www.osti.gov/biblio/1850850},
  note = {Source identifier: 1850850}
}