TY  - RPRT
TI  - Increased selectivity in area-selective ALD by combining nucleation enhancement and SAM-based inhibition
AU  - de Paula, Camila
AU  - Bobb-Semple, Dara
AU  - Bent, Stacey F.
PY  - 2021
DO  - 10.1557/s43578-020-00013-4
UR  - https://www.osti.gov/biblio/1850850
ID  - 1850850
ER  -