@misc{indiciaea94af051ec9a,
  title = {Quantifying the temperature of heated microdevices using scanning thermal probes},
  author = {Reihani, Amin and Yan, Shen and Luan, Yuxuan and Mittapally, Rohith and Meyhofer, Edgar and Reddy, Pramod},
  year = {2021},
  doi = {10.1063/5.0046789},
  url = {https://www.osti.gov/biblio/1850851},
  note = {Source identifier: 1850851}
}