TY - RPRT TI - Quantifying the temperature of heated microdevices using scanning thermal probes AU - Reihani, Amin AU - Yan, Shen AU - Luan, Yuxuan AU - Mittapally, Rohith AU - Meyhofer, Edgar AU - Reddy, Pramod PY - 2021 DO - 10.1063/5.0046789 UR - https://www.osti.gov/biblio/1850851 ID - 1850851 ER -