TY  - RPRT
TI  - Ion beam etching dependence of spin-orbit torque memory devices with switching current densities reduced by Hf interlayers
AU  - Ren, Haowen
AU  - Wu, Shih-Yu
AU  - Sun, Jonathan Z.
AU  - Fullerton, Eric E.
PY  - 2021
DO  - 10.1063/5.0060461
UR  - https://www.osti.gov/biblio/1852981
ID  - 1852981
ER  -