@misc{indiciaea86ef024b7f1,
  title = {High-Fidelity Two-Qubit Gates Using a Microelectromechanical-System-Based Beam Steering System for Individual Qubit Addressing},
  author = {Wang, Ye and Crain, Stephen and Fang, Chao and Zhang, Bichen and Huang, Shilin and Liang, Qiyao and Leung, Pak Hong and Brown, Kenneth R. and Kim, Jungsang},
  year = {2020},
  doi = {10.1103/physrevlett.125.150505},
  url = {https://www.osti.gov/biblio/1853028},
  note = {Source identifier: 1853028}
}