TY - RPRT TI - High-Fidelity Two-Qubit Gates Using a Microelectromechanical-System-Based Beam Steering System for Individual Qubit Addressing AU - Wang, Ye AU - Crain, Stephen AU - Fang, Chao AU - Zhang, Bichen AU - Huang, Shilin AU - Liang, Qiyao AU - Leung, Pak Hong AU - Brown, Kenneth R. AU - Kim, Jungsang PY - 2020 DO - 10.1103/physrevlett.125.150505 UR - https://www.osti.gov/biblio/1853028 ID - 1853028 ER -