@misc{indiciae878c19b4dc1c, title = {A New Route to Quantum-Scale Structures through a Novel Enhanced Germanium Diffusion Mechanism}, author = {Wang, George and Lu, Ping and Sapkota, Keshab and Baczewski, Andrew David and Campbell, Quinn and Schultz, Peter and Jones, Kevin S. and Turner, Emily M. and Sharrock, Chappel J. and Law, Mark E. and Yang, Hongbin}, year = {2021}, doi = {10.2172/1854722}, url = {https://www.osti.gov/biblio/1854722}, note = {Source identifier: 1854722} }