@misc{indiciaec852f628dd9f,
  title = {An in-situ single photon source detection platform for deterministic nanometer resolution ion implantation.},
  author = {Titze, Michael Dominik and Chandrasekaran, Vignesh and Htoon, Han and Bielejec, Edward S.},
  year = {2021},
  doi = {10.2172/1856095},
  url = {https://www.osti.gov/biblio/1856095},
  note = {Source identifier: 1856095}
}