TY  - RPRT
TI  - An in-situ single photon source detection platform for deterministic nanometer resolution ion implantation.
AU  - Titze, Michael Dominik
AU  - Chandrasekaran, Vignesh
AU  - Htoon, Han
AU  - Bielejec, Edward S.
PY  - 2021
DO  - 10.2172/1856095
UR  - https://www.osti.gov/biblio/1856095
ID  - 1856095
ER  -