@misc{indiciae1abb1b606d1e,
  title = {Atomic-resolution lithography with an on-chip scanning tunneling microscope},
  author = {Alipour, Afshin (ORCID:0000000263252067) and Fowler, Emma L. (ORCID:0000000189090812) and Moheimani, S. O. Reza (ORCID:0000000212254126) and Owen, James H. G. and Randall, John N. (ORCID:0000000237232054)},
  year = {2022},
  doi = {10.1116/6.0001826},
  url = {https://www.osti.gov/biblio/1864878},
  note = {Source identifier: 1864878}
}