TY  - RPRT
TI  - Atomic-resolution lithography with an on-chip scanning tunneling microscope
AU  - Alipour, Afshin (ORCID:0000000263252067)
AU  - Fowler, Emma L. (ORCID:0000000189090812)
AU  - Moheimani, S. O. Reza (ORCID:0000000212254126)
AU  - Owen, James H. G.
AU  - Randall, John N. (ORCID:0000000237232054)
PY  - 2022
DO  - 10.1116/6.0001826
UR  - https://www.osti.gov/biblio/1864878
ID  - 1864878
ER  -