TY - RPRT TI - On-Wafer Microfabricated Test Structures for Characterizing RF Breakdown in Narrow Gaps. AU - Ruyack, Alexander AU - Jordan, Matthew AU - Moore, Christopher AU - Hummel, Gwendolyn AU - Herrera, Sergio A. AU - Ballance, Mark Harry AU - Bingham, Andrew Joel AU - Schiess, Adrian Rain Boese AU - Gibson, Christopher Baron AU - Nordquist, Christopher PY - 2021 DO - 10.1109/wmcs52222.2021.9493274 UR - https://www.osti.gov/biblio/1865769 ID - 1865769 ER -