@misc{indiciaee740c42cc9bd,
  title = {Ion Beam Implantation for Nanofabrication and Modification.},
  author = {Bielejec, Edward S.},
  year = {2021},
  doi = {10.2172/1866719},
  url = {https://www.osti.gov/biblio/1866719},
  note = {Source identifier: 1866719}
}