TY - RPRT TI - On-Wafer Microfabricated Test Structures for Characterizing RF Breakdown in Narrow Gaps. AU - Ruyack, Alexander AU - Jordan, Matthew AU - Moore, Christopher AU - Hummel, Gwendolyn AU - Herrera, Sergio A. AU - Ballance, Mark Harry AU - Bingham, Andrew Joel AU - Schiess, Adrian Rain Boese AU - Gibson, Christopher Baron AU - Nordquist, Christopher PY - 2021 DO - 10.2172/1869544 UR - https://www.osti.gov/biblio/1869544 ID - 1869544 ER -