@misc{indiciae27fffa97de03,
  title = {Piezo-optomechanical cantilever modulators for VLSI visible photonics},
  author = {Dong, Mark and Heim, David and Witte, Alex and Clark, Genevieve and Leenheer, Andrew J. and Dominguez, Daniel and Zimmermann, Matthew and Wen, Y. Henry and Gilbert, Gerald and Englund, Dirk and Eichenfield, Matt},
  year = {2022},
  doi = {10.1063/5.0088424},
  url = {https://www.osti.gov/biblio/1869741},
  note = {Source identifier: 1869741}
}