@misc{indiciae759aa087259c,
  title = {Rapid Ge Diffusion along Si/SiO2 Interfaces during High Temperature Oxidation for Quantum-Scale Structures.},
  author = {Thornton, Chappel Sharrock and Hicks, Benjamin and Turner, Emily and Wang, George T. and Law, Mark and Jones, Kevin S.},
  year = {2021},
  doi = {10.2172/1870280},
  url = {https://www.osti.gov/biblio/1870280},
  note = {Source identifier: 1870280}
}