TY  - RPRT
TI  - Rapid Ge Diffusion along Si/SiO2 Interfaces during High Temperature Oxidation for Quantum-Scale Structures.
AU  - Thornton, Chappel Sharrock
AU  - Hicks, Benjamin
AU  - Turner, Emily
AU  - Wang, George T.
AU  - Law, Mark
AU  - Jones, Kevin S.
PY  - 2021
DO  - 10.2172/1870280
UR  - https://www.osti.gov/biblio/1870280
ID  - 1870280
ER  -