TY  - RPRT
TI  - Understanding and reducing mid-spatial frequency ripples during hemispherical sub-aperture tool glass polishing
AU  - Suratwala, T.
AU  - Menapace, J.
AU  - Tham, G.
AU  - Steele, R.
AU  - Wong, L.
AU  - Ray, N.
AU  - Bauman, B.
PY  - 2022
DO  - 10.1364/ao.455233
UR  - https://www.osti.gov/biblio/1871789
ID  - 1871789
ER  -