@misc{indiciae16ff231ee280,
  title = {Characterizing Self-Assembled Monolayer Breakdown in Area-Selective Atomic Layer Deposition},
  author = {Liu, Tzu-Ling and Zeng, Li and Nardi, Katie L. and Hausmann, Dennis M. and Bent, Stacey F.},
  year = {2021},
  doi = {10.1021/acs.langmuir.1c02211},
  url = {https://www.osti.gov/biblio/1873517},
  note = {Source identifier: 1873517}
}