TY  - RPRT
TI  - Characterizing Self-Assembled Monolayer Breakdown in Area-Selective Atomic Layer Deposition
AU  - Liu, Tzu-Ling
AU  - Zeng, Li
AU  - Nardi, Katie L.
AU  - Hausmann, Dennis M.
AU  - Bent, Stacey F.
PY  - 2021
DO  - 10.1021/acs.langmuir.1c02211
UR  - https://www.osti.gov/biblio/1873517
ID  - 1873517
ER  -