@misc{indiciae279055d5ca43,
  title = {High-Performance Piezoelectric MEMS Manufacturing \& Application on Micro Power Generators (CRADA Final Report)},
  author = {Kirchstetter, Thomas and Aktakka, Ethem Erkan},
  year = {2021},
  doi = {10.2172/1874029},
  url = {https://www.osti.gov/biblio/1874029},
  note = {Source identifier: 1874029}
}