TY  - RPRT
TI  - High-Performance Piezoelectric MEMS Manufacturing & Application on Micro Power Generators (CRADA Final Report)
AU  - Kirchstetter, Thomas
AU  - Aktakka, Ethem Erkan
PY  - 2021
DO  - 10.2172/1874029
UR  - https://www.osti.gov/biblio/1874029
ID  - 1874029
ER  -