@misc{indiciae79e26aad35bd,
  title = {Elucidating Novel Diffusion Mechanisms during Si/SiGe Oxidation.},
  author = {Thornton, Chappel Sharrock and Wang, George},
  year = {2022},
  url = {https://www.osti.gov/biblio/1875222},
  note = {Source identifier: 1875222}
}