@misc{indiciae081db8eb0312,
  title = {A novel hardmask-to-substrate pattern transfer method for creating 3D, multi-level, hierarchical, high aspect-ratio structures for applications in microfluidics and cooling technologies},
  author = {Hazra, Sougata and Zhang, Chi and Wu, Qianying and Asheghi, Mehdi and Goodson, Kenneth and Dede, Ercan M. and Palko, James and Narumanchi, Sreekant},
  year = {2022},
  doi = {10.1038/s41598-022-16281-5},
  url = {https://www.osti.gov/biblio/1876476},
  note = {Source identifier: 1876476}
}