TY  - RPRT
TI  - A novel hardmask-to-substrate pattern transfer method for creating 3D, multi-level, hierarchical, high aspect-ratio structures for applications in microfluidics and cooling technologies
AU  - Hazra, Sougata
AU  - Zhang, Chi
AU  - Wu, Qianying
AU  - Asheghi, Mehdi
AU  - Goodson, Kenneth
AU  - Dede, Ercan M.
AU  - Palko, James
AU  - Narumanchi, Sreekant
PY  - 2022
DO  - 10.1038/s41598-022-16281-5
UR  - https://www.osti.gov/biblio/1876476
ID  - 1876476
ER  -