@misc{indiciaeb91ffd0882d1,
  title = {Process Development \& Forensics of SOI Nanoscale Membranes.},
  author = {Harris, Charles and Stewart, Ryan and Nogan, John and Bethke, Donald},
  year = {2021},
  url = {https://www.osti.gov/biblio/1881633},
  note = {Source identifier: 1881633}
}