TY  - RPRT
TI  - Compact, Pull-in-Free Electrostatic MEMS Actuated Tunable Ring Resonator for Optical Multiplexing.
AU  - Ruyack, Alexander
AU  - Grine, Alejandro
AU  - Finnegan, Patrick
AU  - Serkland, Darwin
AU  - Robinson, Samuel
AU  - Weatherred, Scott
AU  - Frost, Megan
AU  - Nordquist, Christopher
AU  - Wood, Michael
PY  - 2021
DO  - 10.1364/fio.2021.ftu6b.5
UR  - https://www.osti.gov/biblio/1882314
ID  - 1882314
ER  -