@misc{indiciae0ea2f67dbc95,
  title = {Using Xe Plasma FIB for High-Quality TEM Sample Preparation},
  author = {Vitale, Suzy M. and Sugar, Joshua Danie},
  year = {2022},
  doi = {10.1017/s1431927622000344},
  url = {https://www.osti.gov/biblio/1882893},
  note = {Source identifier: 1882893}
}