TY  - RPRT
TI  - Using Xe Plasma FIB for High-Quality TEM Sample Preparation
AU  - Vitale, Suzy M.
AU  - Sugar, Joshua Danie
PY  - 2022
DO  - 10.1017/s1431927622000344
UR  - https://www.osti.gov/biblio/1882893
ID  - 1882893
ER  -