@misc{indiciaeea27c5548f65,
  title = {Focused Ion Beams for Deterministic Nanometer-Scale Quantum Device Fabrication.},
  author = {Titze, Michael and Byeon, Heejun and Chandrasekaran, Vigneshwaran and Flores, Anthony and Htoon, Han and Mounce, Andrew and Bielejec, Edward},
  year = {2021},
  doi = {10.2172/1888388},
  url = {https://www.osti.gov/biblio/1888388},
  note = {Source identifier: 1888388}
}