TY  - RPRT
TI  - Focused Ion Beams for Deterministic Nanometer-Scale Quantum Device Fabrication.
AU  - Titze, Michael
AU  - Byeon, Heejun
AU  - Chandrasekaran, Vigneshwaran
AU  - Flores, Anthony
AU  - Htoon, Han
AU  - Mounce, Andrew
AU  - Bielejec, Edward
PY  - 2021
DO  - 10.2172/1888388
UR  - https://www.osti.gov/biblio/1888388
ID  - 1888388
ER  -